Interferometer | White Light Optical Michelson Style Non-Contact Interferometry & Interferometers

Xi-100 Plus | Non-Contact Optical Profiler
Scanning White Light Interferometer

Xi-100 Plus | Non-Contact Optical Scanning White Light Interferometer
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The Xi-100 Plus is designed for the researcher who is interested in getting fast, repeatable data from an instrument that is unencumbered by unnecessary levels of complication. The Xi-100 Plus uses phase-shifting interferometric technology combined with an optical microscope to provide a non-contact 3D method of measuring the roughness of surfaces.

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Xi-100 Plus Features Include:

  • Precise, high-resolution, non-contact 3D profiler.
  • 'Point and shoot' operation. The only instrument adjustments for capturing measurements are sample position and focus, allowing for rapid and easy imaging.
  • Accurate and repeatable data on smooth or rough surfaces.
  • Measures smooth surfaces at the nanometer level - 0.2 nm (smooth mode) Vertical Resolution.


  • Full featured 3D analysis software comes standard with the Xi-100 Plus and operates with Windows®, Intel Processor and TFT Flat Panel Monitor. Analysis package provides surface roughness, waviness, step height, algorithms, and calculation tools.
  • The Xi-100 Plus can quickly and accurately measure smooth surfaces at the nanometer level. Its design makes it easy to measure a variety of sample types: opaque, transparent, smooth or rough with a non-contact interferometric method (requires minimum sample reflectivity of 2% @ 550 nm).
  • X-Y Stage Movement of 100 x 100 nm.
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