Interferometer | Michelson Style White Light Optical Non-Contact Interferometry

Xi-100 Non-Contact Optical Profiler | Scanning White Light Interferometer

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The Xi-100 is designed for the researcher who is interested in getting fast, repeatable data from an instrument that is unencumbered by unnecessary levels of complication. The Xi-100 uses phase-shifting interferometric technology combined with an optical microscope to provide a non-contact 3D method of measuring the roughness of surfaces.
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Xi-100 Features Include:

  • Precise, high-resolution, non-contact 3D profiler
  • 'Point and shoot' operation. The only instrument adjustments for capturing measurements are sample position and focus, allowing for rapid and easy imaging.
  • Accurate and repeatable data on smooth or rough surfaces
  • Measure smooth surfaces at the nanometer level - 0.2 nm (smooth mode) Vertical Resolution


  • Full featured 3D analysis software comes standard with the Xi-100 and operates with Windows®, Intel Processor and TFT Flat Panel Monitor. Analysis package provides surface roughness, waviness, step height, algorithms, and calculation tools
  • The Xi-100 can quickly and accurately measure smooth surfaces at the nanometer level. Its design makes it easy to measure a variety of sample types: opaque, transparent, smooth or rough with a non-contact interferometric method (requires minimum sample reflectivity of 2% @ 550 nm).
  • XY Stage Movement of 100 x 100 nm
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