KLA Pro Systems

KLA Pro Systems provides a variety of certified and remanufactured tools to meet almost every customer’s needs. Many device components serving the IoT, automotive, mobile, µLED and other specialized market segments today use larger design nodes or have unique substrate or material requirements. Often a prior generation KLA inspection or metrology product can best match the technical and economic requirement. We offer a portfolio of certified and remanufactured 150mm and 200mm tools and performance enhancements, as well as adaptable 200mm/300mm tools in support of all semiconductor device types.

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Certified & Remanufactured

Product Families

Defect Inspection

Metrology

Wafer Manufacturing

KLA Certified

KLA Pro Systems offers testing, refurbishment and certification services that deliver the impeccable quality and precision KLA is known for. Our portfolio of certified and remanufactured tools and upgrades, as well as adaptable 200mm/300mm tools in support of all semiconductor device types can help you meet your unique requirements.

KLA Services Enhancements

Tool Optimization

Tool set analyses and optimization

Our Services experts identify opportunities to improve your current toolset with enhancements that can extend the lifespan of your eligible tools, in some cases beyond their original capabilities.

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Tool Performance

Tool availability and performance

We partner with customers to enhance eligible tools and improve performance with flexible service agreements. Select the options that are right for you without paying for things you don’t need.

All Services

Blended Learning

Training to meet your unique needs

Enroll in world class equipment and applications training to get the most out of your investment. We use a combination of live and remote training with the latest systems and technologies to maximize your learning.

Learning & Knowledge Services