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Filmetrics® F60-c Automated Film Thickness Mapper

Filmetrics F60-c film thickness mapping instrument
Filmetrics F60-c film thickness mapping instrument
Filmetrics F60-c film thickness mapping instrument

Filmetrics® F60-c Automated Film Thickness Mapper

The F60-c is a fully automated cassette-to-cassette metrology system for measuring film thickness on unpatterned production and monitor wafers. Seven configurations cover film thickness from 5nm up to 2mm.

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